WF6 e sebelisoa haholo-holo e le thepa e tala bakeng sa mokhoa oa ho beha mouoane oa lik'hemik'hale (CVD) oa tungsten ea tšepe indastering ea lisebelisoa tsa elektroniki. WSi2 e entsoeng ho tloha WF6 e ka sebelisoa e le lisebelisoa tsa marang-rang ho li-circuits tse kholo tse kopantsoeng (LSI), hape e ka sebelisoa e le thepa e tala bakeng sa li-electrode tsa semiconductor, fluorine Raw bakeng sa lik'hemik'hale tsa lik'hemik'hale, li-catalyst tsa polymerization, lisebelisoa tsa optical, joalo-joalo.